Method for simulating the optical surface real shape based on results of processing the interference pattern.

Authors: Khalil S., Druzhin V.V.
Published in issue: #7(84)/2023
DOI: 10.18698/2541-8009-2023-7-920
Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Laser and opto-electronic systems
Keywords: optical system calculation, optical control, surface shape measurement, interference pattern processing, inverse problems
Published: 24.07.2023

The paper describes a method for processing the interference patterns using the MATLAB and data conversion into the Zemax OpticStudio software to simulate the real surface properties. The process includes interference patterns generation using the built-in MATLAB functions, transforming phase information to obtain a surface map using the wave-front reconstruction method and calculating the Zernike polynomial coefficients for further analysis. The Zernike coefficients were imported into a text file and then imported into the Zemax OpticStudio for surface simulation. The proposed method provides a comprehensive approach for processing and analyzing the interference patterns and could be used in high-precision simulation of the optical systems taking into account errors in manufacturing shapes of their constituent elements’ surfaces, such as optics and photonics.

References

[1] Harding K. Handbook of optical dimensional metrology. CRC Press, 2013, 492 p.

[2] Peiponen K.E., Myllyla R., Priezzhev A.V. Optical measurement techniques: innovations for industry and the life sciences. Berlin, Heidelberg: Springer Berlin Heidelberg, 2009, 155 p.

[3] Hariharan P. Basics of interferometry. Elsevier, 2010, 248 p.

[4] Wright T.J., Lu Z., Wicks C. Source model for the Mw 6.7, 23 October 2002, Nenana mountain earthquake (Alaska) from InSAR. Geophysical research letters, 2003, vol. 30 no. 18. http://doi.org/10.1029/2003GL018014

[5] Wright T.J., Parsons B.E., Lu Z. Toward mapping surface deformation in three dimensions using InSAR. Geophysical research letters, 2004, vol. 31, no. 1. http://doi.org/10.1029/2003GL018827

[6] Hooper A., Zebker H., Segall P., Kampes B. A new method for measuring deformation on volcanoes and other natural terrains using InSAR persistent scatterers. Geophysical research letters, 2004, vol. 31, no. 23. http://doi.org/10.1029/2004GL021737

[7] Hung Y.Y. Shearography: a new optical method for strain measurement and nondestructive testing. Optical engineering, 1982, vol. 21, no. 3. https://doi.org/10.1117/12.7972920

[8] Hung Y.Y. Shearography for non-destructive evaluation of composite structures. Optics and lasers in engineering, 1996, vol. 24, pp. 161-182.

[9] Hung Y.Y., Chen Y.S., Ng S.P. et al. Review and comparison of shearography and active thermography for nondestructive evaluation. Materials Science and Engineering: R: Reports, 2009, vol. 64, no. 5–6, pp. 73-112. https://doi.org/10.1016/j.mser.2008.11.001

[10] Han B., Guo Y. Thermal deformation analysis of various electronic packaging products by moire and microscopic moire interferometry. Journal of Electronic Packaging, 1995, vol. 117, pp. 185–191. https://doi.org/10.1115/1.2792090

[11] Post D., Han B., Ifju P. High sensitivity moire: experimental analysis for mechanics and materials. Springer Science & Business Media, 1997, 444 p.

[12] Charriere F., Kuhn J., Colomb T., Montfort F., Cuche E., Emery Y., Weible K., Marquet P., Depeursinge C. Characterization of microlenses by digital holographic microscopy. Applied Optics, 2006, vol. 45, no. 5, pp. 829–835.

[13] Mann C.J., Yu L., Lo C.M., Kim M.K. High-resolution quantitative phase-contrast microscopy by digital holography. Optics Express, 2005, vol. 13, no. 22, pp. 8693–8698. https://doi.org/10.1364/OPEX.13.008693

[14] Marquet P., Rappaz B., Magistretti P.J. et al. Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy. Optics letters, 2005, vol. 30, no. 5, pp. 468–470.

[15] Kemao Q. Windowed fringe pattern analysis. 2013, 300 p. https://doi.org/10.1117/3.1002080

[16] Kemao Q. Two-dimensional windowed Fourier transform for fringe pattern analysis: principles, applications and implementations. Optics and Lasers in Engineering, 2007, vol. 45, no. 2, pp. 304–317. https://doi.org/10.1016/j.optlaseng.2005.10.012