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Method for simulating the optical surface real shape based on results of processing the interference pattern.
Authors: Khalil S., Druzhin V.V. | Published: 24.07.2023 |
Published in issue: #7(84)/2023 | |
DOI: DOI: 10.18698/2541-8009-2023-7-920 | |
Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Laser and opto-electronic systems | |
Keywords: optical system calculation, optical control, surface shape measurement, interference pattern processing, inverse problems |