Designing a magnetic system with two plasma regions for liquid-phase magnetron sputter deposition

Authors: Khramova A.A., Matanin A.R., Vasilev D.D.
Published in issue: #9(14)/2017
DOI: 10.18698/2541-8009-2017-9-161
Category: Mechanical Engineering and Machine Science | Chapter: Forming Technologies and Equipment
Keywords: liquid-phase magnetron sputter deposition, magnetic induction, magnetic system forming two plasma regions, unbalanced magnetron
Published: 14.09.2017

The article considers a way of increasing the magnetic induction generated by a magnetron in order to subsequently perform liquid-phase magnetron sputter deposition. We studied the behaviour of the magnetic field generated by a system of two coaxial cylindrical magnets with a variable distance between them. We present a design of a magnetic system forming two plasma regions that is capable of increasing the magnetic induction above the target. We performed a comparative analysis of the magnetic fields generated by a system with two magnetic regions and a classic magnetic system featuring a single plasma region. The figures we obtained indicate an increase in magnetic field.

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