All articles by "Khramova A.A."
Designing a magnetic system with two plasma regions for liquid-phase magnetron sputter deposition
Authors: Khramova A.A., Matanin A.R., Vasilev D.D. | Published: 14.09.2017 |
Published in issue: #9(14)/2017 | |
DOI: DOI: 10.18698/2541-8009-2017-9-161 | |
Category: Mechanical Engineering and Machine Science | Chapter: Forming Technologies and Equipment | |
Keywords: liquid-phase magnetron sputter deposition, magnetic induction, magnetic system forming two plasma regions, unbalanced magnetron |