All articles by "Vasilev D.D."
Designing a magnetic system with two plasma regions for liquid-phase magnetron sputter deposition
| Authors: Khramova A.A., Matanin A.R., Vasilev D.D. | Published: 14.09.2017 |
| Published in issue: #9(14)/2017 | |
| DOI: DOI: 10.18698/2541-8009-2017-9-161 | |
| Category: Mechanical Engineering and Machine Science | Chapter: Forming Technologies and Equipment | |
| Keywords: liquid-phase magnetron sputter deposition, magnetic induction, magnetic system forming two plasma regions, unbalanced magnetron | |