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Verification of magnetic fields calculation data in the magnetron spraying system
| Authors: Titushkin A.V. | Published: 28.06.2017 |
| Published in issue: #7(12)/2017 | |
| DOI: DOI: 10.18698/2541-8009-2017-7-132 | |
| Category: Informatics, Computer Engineering and Control | Chapter: System Analysis, Control, and Information Processing, Statistics | |
| Keywords: magnetron spraying system, ion sputtering, magnetron, thin film coatings, numerical methods for modeling the magnetic field, magnetic field topology, magnetic field configuration optimization | |