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Creation of mass-sensitive piezoelectric elements by the method of pulsed laser deposition
| Authors: Krivosheev A.V., Ponomarenko S.L. | Published: 19.06.2019 |
| Published in issue: #6(35)/2019 | |
| DOI: DOI: 10.18698/2541-8009-2019-6-492 | |
| Category: Mechanical Engineering and Machine Science | Chapter: Technology and Equipment of Mechanical and Physical Processing | |
| Keywords: pulsed laser deposition, dust sensor, mass-sensitive sensor, quartz microbalance, quartz resonator, environment pollution, thin-film coating, measurement of the thickness of thin films | |