Obtaining the thin diamond-like films by means of the pulsed laser deposition method and examining their properties

Authors: Krivosheev A.V., Ponomarenko S.L.
Published in issue: #6(23)/2018
DOI: 10.18698/2541-8009-2018-6-324
Category: Mechanical Engineering and Machine Science | Chapter: Technology and Equipment of Mechanical and Physical Processing
Keywords: diamond-like films, thin films, pulsed laser deposition, vacuum deposition, laser ablation, excimer laser, ellipsometry, thickness of thin films
Published: 05.06.2018

The article analyzes the methods of obtaining the thin films and describes the application of the pulsed laser deposition method for getting the thin diamond-like films. We consider different ways of measuring the thickness of thin films. The work describes the laser setup PLD-400, including the excimer laser CL 7000 and the vacuum system with the turbomolecular pump Turbovac 350 i. The experimental part is devoted to finding the pulsed laser deposition parameters. We measured the thickness by means of the ellipsometry method. We have found out that the technique for purifying the deposited surface impacts on the coating sturdiness, while the vacuum depth and the distance between the target and the underlay influence on the film thickness.

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