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Obtaining the thin diamond-like films by means of the pulsed laser deposition method and examining their properties
| Authors: Krivosheev A.V., Ponomarenko S.L. | Published: 05.06.2018 |
| Published in issue: #6(23)/2018 | |
| DOI: DOI: 10.18698/2541-8009-2018-6-324 | |
| Category: Mechanical Engineering and Machine Science | Chapter: Technology and Equipment of Mechanical and Physical Processing | |
| Keywords: diamond-like films, thin films, pulsed laser deposition, vacuum deposition, laser ablation, excimer laser, ellipsometry, thickness of thin films | |