Search by keyword: "thin films"
Obtaining the thin diamond-like films by means of the pulsed laser deposition method and examining their properties
Authors: Krivosheev A.V., Ponomarenko S.L. | Published: 05.06.2018 |
Published in issue: #6(23)/2018 | |
DOI: DOI: 10.18698/2541-8009-2018-6-324 | |
Category: Mechanical Engineering and Machine Science | Chapter: Technology and Equipment of Mechanical and Physical Processing | |
Keywords: diamond-like films, thin films, pulsed laser deposition, vacuum deposition, laser ablation, excimer laser, ellipsometry, thickness of thin films |
Monitoring resistance of a thin-film coating in real time
Authors: Fedyunin A.P. | Published: 30.10.2017 |
Published in issue: #11(16)/2017 | |
DOI: DOI: 10.18698/2541-8009-2017-11-203 | |
Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Solid-state electronics, radioelectronic components, micro - and nanoelectronics | |
Keywords: resistance monitoring, electron and ion beam technologies, magnetron sputter deposition, evaporation, thin films, processing station, analog-to-digital convertor, nanoscale island structures |
Materials flux flattening in magnetron spraying systems
Authors: Greshilov V.V. | Published: 09.10.2017 |
Published in issue: #10(15)/2017 | |
DOI: DOI: 10.18698/2541-8009-2017-10-185 | |
Category: Aviation and Rocket-Space Engineering | Chapter: Aircraft Dynamics, Ballistics, Motion Control | |
Keywords: magnetron spraying system, thin films, masking profiles |