| Authors: Fedyunin A.P. |
Published: 30.10.2017 |
| Published in issue: #11(16)/2017 |
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| DOI: DOI: 10.18698/2541-8009-2017-11-203 |
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| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Solid-state electronics, radioelectronic components, micro - and nanoelectronics |
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Keywords: resistance monitoring, electron and ion beam technologies, magnetron sputter deposition, evaporation, thin films, processing station, analog-to-digital convertor, nanoscale island structures
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