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The perspective of the multicriteria optimization method in the process of ion implantation of microcomponents
| Authors: Antropov G.M. | Published: 11.08.2025 |
| Published in issue: #4(99)/2025 | |
| DOI: DOI: | |
| Category: Mechanical Engineering and Machine Science | Chapter: Inspection and Diagnostics in Mechanical Engineering | |
| Keywords: optimization, ion implantation, VIAT, Pareto-optimal solutions, installation, manipulator | |