All articles by "Krivosheev A.V."
Creation of mass-sensitive piezoelectric elements by the method of pulsed laser deposition
Authors: Krivosheev A.V., Ponomarenko S.L. | Published: 19.06.2019 |
Published in issue: #6(35)/2019 | |
DOI: DOI: 10.18698/2541-8009-2019-6-492 | |
Category: Mechanical Engineering and Machine Science | Chapter: Technology and Equipment of Mechanical and Physical Processing | |
Keywords: pulsed laser deposition, dust sensor, mass-sensitive sensor, quartz microbalance, quartz resonator, environment pollution, thin-film coating, measurement of the thickness of thin films |
Obtaining the thin diamond-like films by means of the pulsed laser deposition method and examining their properties
Authors: Krivosheev A.V., Ponomarenko S.L. | Published: 05.06.2018 |
Published in issue: #6(23)/2018 | |
DOI: DOI: 10.18698/2541-8009-2018-6-324 | |
Category: Mechanical Engineering and Machine Science | Chapter: Technology and Equipment of Mechanical and Physical Processing | |
Keywords: diamond-like films, thin films, pulsed laser deposition, vacuum deposition, laser ablation, excimer laser, ellipsometry, thickness of thin films |